Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We have designed a new beetle-like scanning tunneling microscope (STM) that operates under ultra-high-vacuum (UHV) conditions in the temperature range from 300 K down to 7 K. An external magnetic field of up to 8 Tesla can be applied with a removable superconducting magnet. We describe the UHV system with the STM, the cryostat and the superconducting magnet. © 1994.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
J. Tersoff
Applied Surface Science
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