Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Given a nonnegative function f(x), M. W. Wilson observed that if Formula Presented then the polynomials Pn(x), Pn(0) = 1, orthogonal relative to f(x)dμ(x), have an expansion Formula Presented with nonnegative coefficients akn ≥ 0 where Qn(x), Qn(0) =1, are orthogonal relative to dμ(x). Recently it was shown that (1) holds for f(x) = xc, 0 < c > 1. In this paper we characterize those functions f(x) for which (1) is valid for all positive measures dμ(x). © 1978 American Mathematical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Fernando Martinez, Tao Li, et al.
ICLR 2026
I.K. Pour, D.J. Krajnovich, et al.
SPIE Optical Materials for High Average Power Lasers 1992
L Auslander, E Feig, et al.
Advances in Applied Mathematics