J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering
No abstract available.
J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering
John G. Long, Peter C. Searson, et al.
JES
Mark W. Dowley
Solid State Communications
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films