Conference paper
Optimization of real phase-mask performance
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
In this work we propose a direct method for solving systems of linear equations which is based on a successive LU-decomposition of matrices of the form I + uvr. Simultaneously, the factors of an LU-decomposition of the coefficient matrix are obtained. A specific choice of the “rank-one decomposition” of the given matrix leads to a variant of the Gauss elimination process. © 1987, Taylor & Francis Group, LLC. All rights reserved.
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
Ligang Lu, Jack L. Kouloheris
IS&T/SPIE Electronic Imaging 2002
Ronen Feldman, Martin Charles Golumbic
Ann. Math. Artif. Intell.
J. LaRue, C. Ting
Proceedings of SPIE 1989