Conference paper
Characterization of a next generation step-and-scan system
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SPIE Advanced Lithography 1998
In this paper we prove a factorization theorem for strictly m-banded totally positive matrices. We show that such a matrix is a product of m one-banded matrices with positive entries. © 1981.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
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