William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
No abstract available.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
O.F. Schirmer, W. Berlinger, et al.
Solid State Communications
Ranulfo Allen, John Baglin, et al.
J. Photopolym. Sci. Tech.
J.H. Kaufman, Owen R. Melroy, et al.
Synthetic Metals