E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
No abstract available.
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
J. Tersoff
Applied Surface Science
Thomas E. Karis, C. Mark Seymour, et al.
Rheologica Acta
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989