Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
No abstract available.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Daniel J. Costello Jr., Pierre R. Chevillat, et al.
ISIT 1997
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009
M. Tismenetsky
International Journal of Computer Mathematics