Juliann Opitz, Robert D. Allen, et al.
Microlithography 1998
No abstract available.
Juliann Opitz, Robert D. Allen, et al.
Microlithography 1998
John S. Lew
Mathematical Biosciences
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Photomask and Next-Generation Lithography Mask Technology 2004
John A. Hoffnagle, William D. Hinsberg, et al.
Microlithography 2003