Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
No abstract available.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Robert F. Gordon, Edward A. MacNair, et al.
WSC 1985
A. Skumanich
SPIE OE/LASE 1992
Harpreet S. Sawhney
IS&T/SPIE Electronic Imaging 1994