J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering
No abstract available.
J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering
A.B. McLean, R.H. Williams
Journal of Physics C: Solid State Physics
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films