Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The requirements for time-sharing a computer to control and monitor multiple experiments in a solid state physics and physical chemistry laboratory are discussed. A monitor system, which has been implemented on the IBM 1800, to control multiple spectroscopic experiments and collect their data is described. It provides flexible analog and digital input/output routines which, using a multilevel interrupt system, operate in a background mode once they have been initiated from a foreground program, and a priority queuing system to sequence these foreground programs. In addition, provision is made for the utilization of the computer on problems not associated with any connected experiment. A simplified sample application is presented. © 1968.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Guillaume Buthmann, Tomoya Sakai, et al.
ICASSP 2025
Minghong Fang, Zifan Zhang, et al.
CCS 2024
Tong Zhang, G.H. Golub, et al.
Linear Algebra and Its Applications