Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
The importance of transmission electron microscopy (TEM) as a tool for characterizing the crystal growth is discussed. High-resolution images show the crystallinity of bulk materials or the structure of nanoparticles, while analytical microscopy provides us with the distribution of elements present. This information is valuable to crystal growers, and allow them to optimize material microstructure. The developments in aberration correction allow a large polepiece gap, and hence more space around the specimen, that help to avoid the problems of accuracy in parameters of TEM.
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
K.A. Chao
Physical Review B
P.C. Pattnaik, D.M. Newns
Physical Review B