Conference paper
Optimization of real phase-mask performance
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
No abstract available.
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989
Charles Micchelli
Journal of Approximation Theory