Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Self-diffusion coefficients (D) have been measured in nominally pure (NP) α-Zr single crystals (= 50 ppm Fe) in the range 867-1107 K, in directions either parallel (Dpa) or perpendicular (Dpe) to the c-axis. Measurements were also made on high-purity (HP) α-Zr single crystals (< 1.0 ppm Fe) at 1110 K. The diffusion profiles were determined by sectioning and radio-tracer (95 Zr) counting. Sectioning was done with a sputtering device, or a microtome (some NP experiments at 1107 K). D values for NP Zr are about an order of magnitude higher than the corresponding values for HP Zr. Diffusion anisotropy is complicated. The sputter-sectioned NP Zr specimens show increasing anisotropy ratios (AR = Dpa/Dpe), from 1.0 to 3.2, with decreasing temperatures, whereas AR = 0.53 for both the microtome-sectioned NP and sputter-sectioned HP Zr: the low AR value is consistent with expectations based on intrinsic self-diffusion in hcp metals with c/a < 1.633. © 1995.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
William G. Van der Sluys, Alfred P. Sattelberger, et al.
Polyhedron
J.K. Gimzewski, T.A. Jung, et al.
Surface Science
Peter J. Price
Surface Science