E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
The (2×2) reconstructions of GaAs(1» 1» 1») are studied with use of a theoretical approach based on the calculation of the total energy in the context of density-functional theory and the pseudopotential approximation. New models are proposed for the As-rich and Ga-rich reconstructions. The relative chemical potential plays a crucial role in determining the lowest-energy configuration. The total-energy versus chemical-potential curves indicate the possibility of phase transitions between different configurations. One such transition concerning the experimentally observed (19 × 19) reconstruction can be explained as an intermediate phase between the proposed low-energy (2×2) reconstructions. © 1987 The American Physical Society.
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Mark W. Dowley
Solid State Communications