Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Paper
Above-ambient temperature control using a thermoelectric heat pump
Abstract
No abstract available.
Related
Conference paper
Compression for data archiving and backup revisited
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009
John G. Long, Peter C. Searson, et al.
JES
J.H. Stathis, R. Bolam, et al.
INFOS 2005