Conference paper
Characterization of line width variation
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
This paper fills a gap which remained in "Stronger than Uniform Convergence of Multistep Difference Methods", Numerische Mathematik 8, 29 (1966), namely to show that from the stability of the homogeneous difference operator on the particular basis chosen in the solution space one can infer its stability on the whole solution space. © 1966 Springer-Verlag.
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
Ruixiong Tian, Zhe Xiang, et al.
Qinghua Daxue Xuebao/Journal of Tsinghua University
J.P. Locquet, J. Perret, et al.
SPIE Optical Science, Engineering, and Instrumentation 1998
Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering