K.N. Tu
Materials Science and Engineering: A
To combine in a single system the benefits of XPS and UPS, a noble gas cold cathode discharge lamp and a grazing incidence grating monochromator have been attached to a Hewlett-Packard 5950A ESCA spectrometer. Since the HP multichannel detection system was designed for the relatively low count rates associated with a monochromator dispersed X-ray source some customarily unavailable low intensity UV lines can be used. Photoemission spectra for 9 excitation lines of He and Ne spaced approximately every 4 eV between 16.7 and 48.4 eV are presented for a polycrystalline Au test sample. Operation of the ESCA spectrometer's electron optics and hemispherical analyzer for low kinetic energy (< 50 eV) electrons is described. © 1978.
K.N. Tu
Materials Science and Engineering: A
Biancun Xie, Madhavan Swaminathan, et al.
EMC 2011
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
David B. Mitzi
Journal of Materials Chemistry