Investigations of silicon nano-crystal floating gate memories
Arvind Kumar, Jeffrey J. Welser, et al.
MRS Spring 2000
Adhesion between a glass-fiber-filled Teflon PFAR (tetrafluoroethylene and perfluoro- alkoxyvinyl ether co-polymer) film and chromium-coated copper foil was studied. Excellent PFA- copper adhesion was achieved by high temperature lamination at 380°C. X-Ray photoelectron spectroscopy (XPS) studies revealed chemical reactions, defluorination reactions, and metal fluoride formation at the interface. The PFA surface created by etching the laminated copper foil in a ferric chloride solution was found to be quite different in surface properties from that of pure PFA. © 1991, VSP. All rights reserved.
Arvind Kumar, Jeffrey J. Welser, et al.
MRS Spring 2000
A. Ney, R. Rajaram, et al.
Journal of Magnetism and Magnetic Materials
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films