J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering
The interactions of epitaxial Al-films with GaAs (100) surfaces, prepared by molecular beam epitaxy, have been investigated using a variety of surface sensitive techniques: Auger electron spectroscopy, electron energy-loss spectroscopy and reflection high energy electron diffraction. Depending on the substrate temperature, two entirely different reactions are observed, which result in two different crystallographic orientations of the Al-film. At elevated temperature a Ga-Al exchange reaction, similar to that reported for Al on the GaAs (110) surface, takes place. However, with the substrate near room temperature no evidence for such a reaction is found. The results are substantiated by comparison with measurements on thin Ga overlayers on AlAs, prepared to simulate surfaces with exchange reaction geometry. © 1981.
J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
Douglass S. Kalika, David W. Giles, et al.
Journal of Rheology
John G. Long, Peter C. Searson, et al.
JES