Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper
27 Jan 2004

Alteration of Cu conductivity in the size effect regime

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Abstract

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Date

27 Jan 2004

Publication

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Authors

  • S.M. Rossnagel
  • T.S. Kuan
IBM-affiliated at time of publication

Topics

  • Physical Sciences

Resources

  • Publication

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