Sai Zeng, Angran Xiao, et al.
CAD Computer Aided Design
No abstract available.
Sai Zeng, Angran Xiao, et al.
CAD Computer Aided Design
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Limin Hu
IEEE/ACM Transactions on Networking
Donald Samuels, Ian Stobert
SPIE Photomask Technology + EUV Lithography 2007