Conference paper
Isotropic treatment of EMF effects in advanced photomasks
Jaione Tirapu Azpiroz, Alan E. Rosenbluth, et al.
SPIE Photomask Technology + EUV Lithography 2009
An algorithm is presented for reducing the generalised moment of inertia of a rectangular variable-attribute matrix by applying independent row and column permutations. Finite termination properties of the algorithm are demonstrated and its application to two problems reviewed. © 1978.
Jaione Tirapu Azpiroz, Alan E. Rosenbluth, et al.
SPIE Photomask Technology + EUV Lithography 2009
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