Conference paper
Characterization of a next generation step-and-scan system
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We show how to replace the point functional of numerical analysis with types of stable functional of highly oscillatory solutions of differential equations. This replacement leads to the development of effective numerical methods for the stiff highly oscillatory problem. © 1976, American Mathematical Society.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
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