Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We evaluate the proportionality constant β for neon in the Esbjerg-Nørskov potential VR(r) = βρ{variant}(r) from experimental data on Ni(110), Ni(113), Cu(110) and Pd(110). Our calculations using overlapping atomic charge densities require that β be material and surface-dependent. Although Ne diffraction is more sensitive to details of corrugation shapes than He, we found it to be insensitive to normal relaxations of the topmost layers. © 1986.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A. Ney, R. Rajaram, et al.
Journal of Magnetism and Magnetic Materials
Mark W. Dowley
Solid State Communications
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Surface Science