Mark W. Dowley
Solid State Communications
We have observed an anomalous coverage dependence of sputtered Cs+ and Li+ yields from Cs and Li overlayers on Si(111) surfaces. The ion yield reaches a maximum and decreases at higher coverages even when the coverage is still less than a monolayer. We found that this phenomenon is directly related to the effect of the work function on the ionization probability. © 1984 The American Physical Society.
Mark W. Dowley
Solid State Communications
Xikun Hu, Wenlin Liu, et al.
IEEE J-STARS
Dipanjan Gope, Albert E. Ruehli, et al.
IEEE T-MTT
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010