Antenna coupled far-infrared/THz detector in CMOS

An infrared detector in standard SOI technology is proposed that comprises an antenna-coupled bolometer and a MOSFET as a sensor. As proof of concept, a logarithmic planar antenna was designed and implemented in 90 nm bulk CMOS technology and connected to the proposed detector. Measurements at 10m wavelength confirm the feasibility of this approach. © 2009 The Institution of Engineering and Technology.