Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
In this paper the design of radiation sensitive polymeric imaging systems is reviewed. Advances in design have led to systems that function on the basis of radiation-induced changes in the polarity of polymer repeating units rather than cross-linking. These new systems offer improved resolution, since they do not swell during development. Improvement in sensitivity has been achieved by designing systems that incorporate chemical amplification. The design principles leading to amplification and examples of systems that demonstrate amplification are presented. © 1986, The Electrochemical Society, Inc. All rights reserved.
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
M. Hargrove, S.W. Crowder, et al.
IEDM 1998
Surendra B. Anantharaman, Joachim Kohlbrecher, et al.
MRS Fall Meeting 2020
A. Ney, R. Rajaram, et al.
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