Conference paper
Copper ULSI interconnect technology
D. Edelstein
MRS Spring 1998
No abstract available.
D. Edelstein
MRS Spring 1998
S. Cohen, J.C. Liu, et al.
MRS Spring Meeting 1999
Shiyi Chen, Daniel Martínez, et al.
Physics of Fluids
H. Tang, M.T. Cuberes, et al.
Surface Science