R.B. Morris, Y. Tsuji, et al.
International Journal for Numerical Methods in Engineering
No abstract available.
R.B. Morris, Y. Tsuji, et al.
International Journal for Numerical Methods in Engineering
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Imran Nasim, Melanie Weber
SCML 2024
J. LaRue, C. Ting
Proceedings of SPIE 1989