Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper
Atomic layer deposition of metal and nitride thin films: Current research efforts and applications for semiconductor device processing
Abstract
No abstract available.
Related
R. Ghez, J.S. Lew
Journal of Crystal Growth
J.V. Harzer, B. Hillebrands, et al.
Journal of Magnetism and Magnetic Materials
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008