Andreas C. Cangellaris, Karen M. Coperich, et al.
EMC 2001
Paper
Auger analyzer translation using ball bushings
Abstract
We describe a ball bushing assembly which supports a cylindrical mirror analyzer allowing it to be translated 5.5 in. By a linear motion feedthrough. The assembly mounts on an 8-in. Flange and avoids the use of bellows. © 1988, American Vacuum Society. All rights reserved.
Related
Q.R. Huang, Ho-Cheol Kim, et al.
Macromolecules
U. Wieser, U. Kunze, et al.
Physica E: Low-Dimensional Systems and Nanostructures
J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering