Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The urgent need for reliable business applications demands the emergence of a powerful yet easy-to-use language for business property reasoning. The Business Property Specification Language (BPSL) and its supporting tool (BPSL modeler) are presented to address the issue. BPSL modeler facilitates the specification and understanding of business properties by simplifying the expression of complex logics and common behaviors in business processes and exploiting intuitive notations for property representation. It also serves as a key component of our method for model checking business processes. Important ideas and features of BPSL modeler are provided in this paper to help understand its effectiveness. © 2008 Elsevier B.V.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Matthias Kaiserswerth
IEEE/ACM Transactions on Networking
Renu Tewari, Richard P. King, et al.
IS&T/SPIE Electronic Imaging 1996
Rolf Clauberg
IBM J. Res. Dev