Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
IBM's Unstructured information Management Architecture (UIMA) is a software architecture for developing and deploying unstructured information management (UIM) applications. In this paper we provide a high-level overview of the architecture, introduce its basic components, and describe the set of tools that constitute a UIMA development framework. Then we take the reader through the steps involved in building a simple UIM application, thus highlighting the major UIMA concepts and techniques. © 2004 IBM.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Sonia Cafieri, Jon Lee, et al.
Journal of Global Optimization
Donald Samuels, Ian Stobert
SPIE Photomask Technology + EUV Lithography 2007
Thomas M. Cover
IEEE Trans. Inf. Theory