Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
No abstract available.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Jonathan Ashley, Brian Marcus, et al.
Ergodic Theory and Dynamical Systems
Martin Charles Golumbic, Renu C. Laskar
Discrete Applied Mathematics
Nimrod Megiddo
Journal of Symbolic Computation