Accounts of Chemical Research

Paper

01 Jun 1994

Chemical Amplification in High-Resolution Imaging Systems

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Abstract

No abstract available.

Paper

Airborne Contamination of a Chemically Amplified Resist. 2. Effect of Polymer Film Properties on Contamination Rate

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Chemistry of Materials

Paper

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Photo-Cross-Linking of Poly(4-hydroxystyrene) via Electrophilic Aromatic Substitution: Use of Polyfunctional Benzylic Alcohols in the Design of Chemically Amplified Resist Materials with Tunable Sensitivities

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Conference paper

Crosslinked epoxy polymers with large and stable nonlinear optical susceptibilities

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Proceedings of SPIE 1989

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