Anton W. Bosman, Robert Vestberg, et al.
JACS
No abstract available.
Anton W. Bosman, Robert Vestberg, et al.
JACS
Lewis W. Flanagin, Christopher L. McAdams, et al.
Microlithography 1998
Stephen Matuszczak, James F. Cameron, et al.
Journal of Materials Chemistry
Scott A. MacDonald, Jean M.J. Frechet, et al.
Microelectronic Engineering