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Microelectronic Engineering
No abstract available.
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
M. Hargrove, S.W. Crowder, et al.
IEDM 1998
H.D. Dulman, R.H. Pantell, et al.
Physical Review B