Conference paper
Single and dual wavelength exposure of photoresist
J. LaRue, C. Ting
Proceedings of SPIE 1989
In the spirit of Wilkinson's [1, 2] backward error analysis, conditions are established under which a given approximate solution of a system of n linear equations with n unknowns is the exact solution of a modified system whose coefficients and right-hand sides are within a given neighborhood of those of the original system. © 1964 Springer-Verlag.
J. LaRue, C. Ting
Proceedings of SPIE 1989
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