Single and dual wavelength exposure of photoresist
J. LaRue, C. Ting
Proceedings of SPIE 1989
This paper is concerned with the study of a general class of functional equations covering as special cases the relation which defines the up-function as well as equations which arise in multiresolution analysis for wavelet construction. We discuss various basic properties of solutions to these functional equations such as regularity, polynomial containment within the space spanned by their integer shifts and their computability by subdivision algorithms. © 1993 J.C. Baltzer AG, Science Publishers.
J. LaRue, C. Ting
Proceedings of SPIE 1989
Jaione Tirapu Azpiroz, Alan E. Rosenbluth, et al.
SPIE Photomask Technology + EUV Lithography 2009
Peter Wendt
Electronic Imaging: Advanced Devices and Systems 1990
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010