I. Morgenstern, K.A. Müller, et al.
Physica B: Physics of Condensed Matter
No abstract available.
I. Morgenstern, K.A. Müller, et al.
Physica B: Physics of Condensed Matter
S. Cohen, J.C. Liu, et al.
MRS Spring Meeting 1999
J.C. Marinace
JES
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010