Conference paper
Single and dual wavelength exposure of photoresist
J. LaRue, C. Ting
Proceedings of SPIE 1989
No abstract available.
J. LaRue, C. Ting
Proceedings of SPIE 1989
L Auslander, E Feig, et al.
Advances in Applied Mathematics
James Lee Hafner
Journal of Number Theory
R.B. Morris, Y. Tsuji, et al.
International Journal for Numerical Methods in Engineering