Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We have investigated the cubic to tetragonal phase transition in RbCaF3 under [110] uniaxial stress by monitoring the EPR lines of the cubic Gd3+ centre which shift proportionaly to the square of the order parameter (the rotational anngle of the CaF6 octahedra φ) or those of the Gd3+-O2-pair which splits linearly in φ. © 1991, Taylor & Francis Group, LLC. All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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Physical Review B
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IEEE J-STARS
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