Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We report here the synthesis and characterization of poly(amic ethyl ester) oligomers functionalized with trimethoxysilyl end-groups. The oligomers were prepared via the condensation of 1,1-bis(4-aminophenyl)-1-phenyl-2,2,2-trifluoroethane, diethyldichloromellitate and p-aminophenyltrimethoxysilane. The p-aminophenyltrimethoxysilane was used to control both molecular weight and end-group functionality. These oligomers were thermally cured to form crosslinked networks. The resulting networks possessed Tg in excess of 450°C and thermal decomposition temperatures in the proximity of 500°C. The formation of networks was confirmed by swelling studies. These oligomers offer an attractive processing alternative as low viscosity precursors to crosslinked polyimide networks. © 1997 Elsevier Science Ltd.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Arvind Kumar, Jeffrey J. Welser, et al.
MRS Spring 2000
Ronald Troutman
Synthetic Metals
Kenneth R. Carter, Robert D. Miller, et al.
Macromolecules