Hans Loeschner, Gerhard Stengl, et al.
Journal of Microlithography, Microfabrication and Microsystems
No abstract available.
Hans Loeschner, Gerhard Stengl, et al.
Journal of Microlithography, Microfabrication and Microsystems
Benjamin W. Chui, Thomas W. Kenny, et al.
IMECE 1997
Robert P. Ried, H. Jonathon Mamin, et al.
JMEMS
Manfred Albrecht, Srikanth Ganesan, et al.
IEEE Transactions on Magnetics