H. Jonathon Mamin, Robert P. Ried, et al.
Proceedings of the IEEE
No abstract available.
H. Jonathon Mamin, Robert P. Ried, et al.
Proceedings of the IEEE
Benjamin W. Chui, Thomas W. Kenny, et al.
IMECE 1997
Benjamin W. Chui, Timothy D. Stowe, et al.
JMEMS
Gary M. McClelland, Mark W. Hart, et al.
Applied Physics Letters