Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
In this paper we solve the decision problem of a certain second- order mathematical theory and apply it to obtain a large number of decidability results. The method of solution involves the development of a theory of automata on infinite trees—a chapter in combinatorial mathematics which may be of independent interest.
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
F. Odeh, I. Tadjbakhsh
Archive for Rational Mechanics and Analysis
T. Graham, A. Afzali, et al.
Microlithography 2000
Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering