Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The decomposition of polyperfluorinated ether copolymers containing perfluoroethylene oxide, -CF2CF2O-, and perfluoromethylene oxide units, -CF2O-, capped by different end groups, -OCF3, -CH2OH, and -O(O=C)CH3, are investigated. Thus, the polymers are scissioned via an electron beam, and the subsequent chemistry is investigated. In all cases, the polymers lose mass, R-CFO on the ends of scissioned chains are produced, and volatile gases such as COF2 are evolved. The G values for polymer decomposition are 0.2-0.8; for gas evolution are 6-7; and for R-CFO end groups are ≃1.5. The end group -CH2OH has a significant effect on the chemistry after irradiation. The oligomeric R-CFO groups produced upon irradiation react with the -CH2OH end groups to produce ester and HF via alcoholysis. The aldehyde -CHO is also produced as a result of direct electron beam irradiation.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Mark W. Dowley
Solid State Communications
Surendra B. Anantharaman, Joachim Kohlbrecher, et al.
MRS Fall Meeting 2020
Thomas H. Baum, Carl E. Larson, et al.
Journal of Organometallic Chemistry