Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
In this paper we review the structural identification and electronic properties of the K- and N-centers, and positive charges in as-deposited and UV-illuminated amorphous silicon nitride thin films. © 1993.
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
Peter J. Price
Surface Science
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Zeitschrift fur Kristallographie - New Crystal Structures
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