K.A. Chao
Physical Review B
In this paper we review the structural identification and electronic properties of the K- and N-centers, and positive charges in as-deposited and UV-illuminated amorphous silicon nitride thin films. © 1993.
K.A. Chao
Physical Review B
Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
J.Z. Sun
Journal of Applied Physics