Frank R. Libsch, Takatoshi Tsujimura
Active Matrix Liquid Crystal Displays Technology and Applications 1997
Paper
Defects in amorphous hydrogenated silicon nitride films
Abstract
In this paper we review the structural identification and electronic properties of the K- and N-centers, and positive charges in as-deposited and UV-illuminated amorphous silicon nitride thin films. © 1993.
Related
H.D. Dulman, R.H. Pantell, et al.
Physical Review B
John G. Long, Peter C. Searson, et al.
JES
David B. Mitzi
Journal of Materials Chemistry