An ultra-low thermal-budget SiGe-base bipolar technology
J.N. Burghartz, D.A. Grützmacher, et al.
VLSI Technology 1993
The first operational bipolar inversion-channel field-effect transistors (BICFET’s) based on the GexSi1-x/Si system have been successfully demonstrated. The 300 K current gain of β = 365 at a current density of Jc= 2.5 x 104A/cm2 is believed to be the highest value reported for any BICFET to date. The use of a double-heterojunction inversion channel eliminates the collector offset voltage. The present devices are limited by the channel resistance, so that performance improvements are expected for laterally scaled-down devices. © 1989 IEEE
J.N. Burghartz, D.A. Grützmacher, et al.
VLSI Technology 1993
H.K. Liou, X. Wu, et al.
Applied Physics Letters
C.-Y. Ting, F.M. d'Heurle, et al.
ECS Meeting 1984
Subramanian S. Iyer, Frederick G. Allen
ECS Meeting 1984