John G. Long, Peter C. Searson, et al.
JES
We observe clearly resolved diffraction peaks in the scattering of argon from a 2H-W(100) surface, demonstrating the importance of quantum effects even for relatively heavy atoms. The argon diffraction peak intensities decrease exponentially with substrate temperature in a manner consistent with a surface Debye temperature of ~ 400 K. For large incidence angles, (e.g. θi = 60°), angular distributions are observed to consist of a single quasi-specular lobe which narrows substantially with incidence energy. In contrast, for θi = 30°, a rainbow distribution is found with the angular separation of the two lobes decreasing with increasing energy. These observations are discussed in terms of classical and quantum models of gas-surface scattering. © 1991.
John G. Long, Peter C. Searson, et al.
JES
Ranulfo Allen, John Baglin, et al.
J. Photopolym. Sci. Tech.
J.H. Stathis, R. Bolam, et al.
INFOS 2005
A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990